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Highly reliable and low voltage actuated Ohmic RF MEMS switch with waver level packaging
Highly reliable and low voltage actuated Ohmic RF MEMS switch with waver level packaging Steffen Kurtha, Markus Nowackb, Sven Voigtb, Andres Bertzb, Jörg Frömela, Christian Kaufmannb, Thomas Gessnera, Akira Akibac, Koichi Ikedac Fraunhofer ENAS, Technologie-Campus 3, Chemnitz, D-09126, Germany; Chemnitz Univ. of Tech., Center for Microtechnologies, Reichenhainer Str. 70, Chemnitz D09126, Germany;
New Developments on GaN membrane FBARs
New Developments on GaN membrane FBARs Alexandra Stefanescu1, Dan Neculoiu1, Alexandru Muller1, G. Konstantinidis2, T. Kostopulos,2 A. Stavrinidis2, I. Petrini1, D. Dascalu1 1 IMT Bucharest, 32B, Erou Iancu Nicolae str., 077190 Bucharest, Romania, +40212690775 2 FORTH-IESL-MRG Heraklion, PO Box 1527, Crete, Greece This paper presents the modelling, manufacturing and characterization of the GaN b
Membrane Supported Millimeter Wave Bandstop Resonators
Membrane Supported Millimeter Wave Bandstop Resonators Alina-Cristina Bunea, Dan Neculoiu, Alexandru Muller National Institute for Research and Development in Microtechnologies, IMT Bucharest, Str. Erou Iancu Nicolae 126A, 077190 Bucharest, Romania, Phone: +40-21-269 0775 Abstract This paper presents the electromagnetic modeling and experimental results of a interdigitated bandstop resonator fa
Gas and humidity sensors based on high frequency acoustic devices manufactured on GaN/Si
Gas and humidity sensors based on high frequency acoustic devices manufactured on GaN/Si A. Cismaru1, G. Konstantinidis2, K. Szacilowski3,4, A. Müller1, A. Stefanescu1, A. Stavrinidis2, K. Tsagaraki2, T. Kostopulos2, D. Neculoiu1, G. Stavrinidis1, C. Buiculescu1 and P. Kwolek3 1 IMT Bucharest, 32B, Erou Iancu Nicolae str., 077190 Bucharest, Romania 2 3 4 FORTH-IESL-MRG Heraklion, PO Box 1527, Cr
A CMOS Compatible Ku-band RF MEMS Switch
A CMOS Compatible Ku-band RF MEMS Switch Pekka Rantakari, Jan Saijets, Mikko Tuohiniemi and Tauno Vähä-Heikkilä VTT Technical Research Centre of Finland, Sensors and Wireless Devices, Tietotie 3, Espoo, P.O.BOX 1000, FI02044 VTT, Finland, +358407215148 Abstract -- This paper presents design, fabrication and characterization of a capacitive RF MEMS switch for Kuband applications. The switch is fabr
3-bit CPW Phase Shifter Implemented by a Reduced Branch Line Coupler
3-bit CPW Phase Shifter Implemented by a Reduced Branch Line Coupler Ozgehan Kilic, Ilker Comart, Simsek Demir, Tayfun Akin Department of Electrical and Electronics Engineering Middle East Technical University Ankara, Turkey Abstract-- A coplanar waveguide (CPW) phase shifter is designed at 35 GHz by implementing a reduced branch line coupler (BLC) structure. The /4 length lines between the ports
A V-Band RF-MEMS SPDT Switch Network in a SiGe BiCMOS Process Technology
A V-Band RF-MEMS SPDT Switch Network in a SiGe BiCMOS Process Technology 1 1 S.Reyaz, 2C.Samuelsson, 1,2R.Malmqvist, 3M. Kaynak, 1A. Rydberg Uppsala University, Ångströmlaboratoriet, Lägerhyddsvägen 1, Box 337, 751 05 Uppsala Sweden 2 Swedish Defence Research Agency (FOI), Olaus Magnus väg 42, SE 58330 Linköping Sweden 3 IHP, Frankfurt (Oder), Germany Abstract-- We present a V-band (50-75 GHz
Impedance measurement of mm-wave metamaterial antennas on ceramic substrate
Impedance measurement of mm-wave metamaterial antennas on ceramic substrate Sajin Gheorghe Ioan(1), Iulia Andreea Mocanu(2), Marius Andrei Voicu(3), Cornel Anton(1) (1) National Research Institute for Microtechnologies, IMT Bucharest Microwave Laboratory, 126A Erou Iancu Nicolae Street, PO BOX 38-160, 023573 Bucharest, Romania E-mail: gheorghe.sajin@imt.ro (2) Politechnica University of Bucharest
A77 GHz On-Chip Dipole Antenna with Etched Silicon Substrate
A77 GHz On-Chip Dipole Antenna with Etched Silicon Substrate Mehdi Seyyed-Esfahlan1, Mehmet Kaynak2, and Ibrahim Tekin1 2 Sabanci University, Electronics Engineering, 34956 IST, TURKEY Technology/Process Integration IHP GmbH, 15236 Frankfurt, Germany the output ports/Yagi arms) on 74-82 GHz band, in which phase alternates up to 5º over 180º between two input ports of the Yagi antenna arms, is pre
Reliability issues of RF-MEMS
European School of Antennas - ESoA Reliability issues of RF-MEMS Xavier Rottenberg, Walter De Raedt, Harrie Tilmans, Ingrid De Wolf Xavier.Rottenberg@imec.be RF-MEMS Antennas, Ankara 25.6.2012-29.6.2012 Outline · Part 1 Introduction Basics of electrostatic actuation Application to RF-MEMS · Part 2 Reliability study and approach · Part 3 Impact of the dielectric charging Impact of